Robot for simultaneous substrate transfer

Assignee

• Applied Materials

Inventors

• Jason M. Schaller (57 patents)
• Charles T. Carlson (78 patents)
• Luke Bonecutter (18 patents)
• David Blahnik (32 patents)
• Karuppasamy Muthukamatchi (14 patents)
• Jeff Hudgens (13 patents)
• Benjamin B. Riordon (48 patents)

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