Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8322045 | Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife | Nathan D. Stein, Younes Achkire, Julia Svirchevski, Dan Marohl | 2012-12-04 |
| 8318609 | Method of depositing materials on a non-planar surface | Dan Marohl, Ratson Morad | 2012-11-27 |
| 8193803 | Current measuring device | Sanjay Bose, Anthony T. Giuliante, Amir Makki, John Walsh, Douglas A. Voda | 2012-06-05 |
| 7845308 | Systems incorporating microwave heaters within fluid supply lines of substrate processing chambers and methods for use of such systems | Jason Stephen Corneille, Nancy E. Gilbert, Robert Tas, Steven Flanders, Jason Wright +2 more | 2010-12-07 |
| 7114693 | Stable cell platform | Donald Olgado, Avi Tepman | 2006-10-03 |
| 6837964 | Integrated platen assembly for a chemical mechanical planarization system | Dan Marohl | 2005-01-04 |
| 6571657 | Multiple blade robot adjustment apparatus and associated method | Donald Olgado, Avi Tepman | 2003-06-03 |
| 6568896 | Transfer chamber with side wall port | Dan Marohl | 2003-05-27 |
| 6503131 | Integrated platen assembly for a chemical mechanical planarization system | Dan Marohl | 2003-01-07 |
| 6361674 | Powered lift for ECP chamber | — | 2002-03-26 |
| 6274854 | Method and apparatus for baking out a gate valve in a semiconductor processing system | David Datong Huo | 2001-08-14 |
| 5965046 | Method and apparatus for baking out a gate valve in a semiconductor processing system | David Datong Huo | 1999-10-12 |