Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551905 | Resonant process monitor | Yaoling Pan, Vijaykumar Krithivasan, Kelvin Chan, Michael D. Willwerth, Anantha K. Subramani +5 more | 2023-01-10 |
| 10957565 | Processing tool having a monitoring device | Simon Huang, Ashish Goel, Anantha K. Subramani, Philip Allan Kraus | 2021-03-23 |
| 10763143 | Processing tool having a monitoring device | Simon Huang, Ashish Goel, Anantha K. Subramani, Philip Allan Kraus | 2020-09-01 |