Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11598005 | Deposition apparatus including an off-axis lift-and-rotation unit and methods for operating the same | Shoichi Murakami, Syo Fukata, Yusuke OSAWA, Shigehiro Fujino, Masaaki Higashitani | 2023-03-07 |
| 11551961 | Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same | Shoichi Murakami, Syo Fukata, Yusuke OSAWA, Shigehiro Fujino, Masaaki Higashitani | 2023-01-10 |
| 11538708 | Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same | Shoichi Murakami, Syo Fukata, Yusuke OSAWA, Shigehiro Fujino, Masaaki Higashitani | 2022-12-27 |