Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935784 | Three-dimensional memory device containing self-aligned bit line contacts and methods for forming the same | Fumitaka Amano, Yusuke OSAWA, Kensuke Ishikawa, Mitsuteru Mushiga, Motoki KAWASAKI +4 more | 2024-03-19 |
| 11598005 | Deposition apparatus including an off-axis lift-and-rotation unit and methods for operating the same | Shoichi Murakami, Shigeru NAKATSUKA, Yusuke OSAWA, Shigehiro Fujino, Masaaki Higashitani | 2023-03-07 |
| 11551961 | Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same | Shoichi Murakami, Shigeru NAKATSUKA, Yusuke OSAWA, Shigehiro Fujino, Masaaki Higashitani | 2023-01-10 |
| 11538708 | Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same | Shoichi Murakami, Shigeru NAKATSUKA, Yusuke OSAWA, Shigehiro Fujino, Masaaki Higashitani | 2022-12-27 |
| 10847376 | In-situ deposition and etch process and apparatus for precision patterning of semiconductor devices | Yusuke OSAWA, Naoto Umehara, Sung-Tae Lee | 2020-11-24 |
| 9978768 | Method of making three-dimensional semiconductor memory device having laterally undulating memory films | Jiyin Xu, Ryoichi Honma | 2018-05-22 |
| 9305935 | Multi-level contact to a 3D memory array and method of making | Yao-Sheng Lee, Zhen Chen | 2016-04-05 |
| 8994099 | Multi-level contact to a 3D memory array and method of making | Yao-Sheng Lee, Zhen Chen | 2015-03-31 |
| 8828884 | Multi-level contact to a 3D memory array and method of making | Yao-Sheng Lee, Zhen Chen | 2014-09-09 |