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High aspect ratio via fill process employing selective metal deposition and structures formed by the same |
Fumitaka Amano |
2024-09-10 |
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Three-dimensional memory device containing self-aligned bit line contacts and methods for forming the same |
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2024-03-19 |
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Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwasaki, Kiyomi Katsuyama +3 more |
2019-05-28 |
| 10121693 |
Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwasaki, Kiyomi Katsuyama +3 more |
2018-11-06 |
| 10115735 |
Semiconductor device containing multilayer titanium nitride diffusion barrier and method of making thereof |
Fumitaka Amano, Shinya Inoue, Michiaki Sano |
2018-10-30 |
| 9818639 |
Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwasaki, Kiyomi Katsuyama +3 more |
2017-11-14 |
| 9779312 |
Environment recognition system |
Yoshiaki Sakagami, Taku Osada |
2017-10-03 |
| 9659867 |
Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwasaki, Kiyomi Katsuyama +3 more |
2017-05-23 |
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Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwasaki, Kiyomi Katsuyama +3 more |
2016-11-08 |
| 9064870 |
Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwasaki, Kiyomi Katsuyama +3 more |
2015-06-23 |
| 8810034 |
Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwasaki, Kiyomi Katsuyama +3 more |
2014-08-19 |
| 8617981 |
Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwasaki, Kiyomi Katsuyama +3 more |
2013-12-31 |
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Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwaskai, Kiyomi Katsuyama +3 more |
2013-04-30 |
| 8053893 |
Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwaskai, Kiyomi Katsuyama +3 more |
2011-11-08 |
| 7777343 |
Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwasaki, Kiyomi Katsuyama +3 more |
2010-08-17 |
| 7777346 |
Semiconductor integrated circuit device and a method of manufacturing the same |
Tatsuyuki Saito, Masanori Miyauchi, Toshio Saito, Hiroshi Ashihara |
2010-08-17 |
| 7569476 |
Semiconductor integrated circuit device and a method of manufacturing the same |
Tatsuyuki Saito, Masanori Miyauchi, Toshio Saito, Hiroshi Ashihara |
2009-08-04 |
| 7459786 |
Semiconductor device |
Hiromi Shimazu, Tomio Iwasaki, Hiroyuki Ohta, Osamu Inoue, Takayuki Oshima |
2008-12-02 |
| 7323781 |
Semiconductor device and manufacturing method thereof |
Junji Noguchi, Takayuki Oshima, Noriko Miura, Tomio Iwaskai, Kiyomi Katsuyama +3 more |
2008-01-29 |
| 7095120 |
Semiconductor integrated circuit device with a connective portion for multilevel interconnection |
Tatsuyuki Saito, Masanori Miyauchi, Toshio Saito, Hiroshi Ashihara |
2006-08-22 |
| 7018919 |
Method of manufacturing a semiconductor integrated circuit device including a hole formed in an insulating film and a first conductive film formed over a bottom region and sidewalls of the hole |
Tatsuyuki Saito, Masanori Miyauchi, Toshio Saito, Hiroshi Ashihara |
2006-03-28 |
| 6838772 |
Semiconductor device |
Toshio Saitoh, Hiroshi Ashihara, Tatsuyuki Saito |
2005-01-04 |
