Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847376 | In-situ deposition and etch process and apparatus for precision patterning of semiconductor devices | Yusuke OSAWA, Syo Fukata, Sung-Tae Lee | 2020-11-24 |
| 8030216 | Method of making semiconductor device | Shinichi Kozuka | 2011-10-04 |
| 7405160 | Method of making semiconductor device | Shinichi Kozuka | 2008-07-29 |