Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551905 | Resonant process monitor | Yaoling Pan, Vijaykumar Krithivasan, Shimin Mao, Kelvin Chan, Michael D. Willwerth +5 more | 2023-01-10 |
| 7719681 | Apparatus and method for measuring vapor flux density | — | 2010-05-18 |
| 5880823 | Method and apparatus for measuring atomic vapor density in deposition systems | — | 1999-03-09 |