Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multiple electron beam lithography system with multiple beam modulated laser illumination

Multiple electron beam lithography system with multiple beam modulated laser illumination

US Patent 6724002 · Granted Apr 20, 2004

Estimated economic value: $36,667,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems, devices, and methods for performing a non-contact electrical measuremen2025
High speed scanning systems for super resolution imaging2025
High speed scanning system with acceleration tracking2025
Steering wheel cover2025
Multi-objective path planning method for intelligent public transport system2024
Sequencing and high resolution imaging2024
Systems, devices, and methods for performing a non-contact electrical measuremen2024
Densley-packed analyte layers and detection methods2024
Kitchen rack2024
Steering wheel cover2023
Methods and devices for de novo oligonucleic acid assembly2023
Devices and methods for oligonucleic acid library synthesis2023