Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6225744 | Plasma process apparatus for integrated circuit fabrication having dome-shaped induction coil | Jeffrey C. Benzing, Eliot K. Broadbent, J. Kirkwood H. Rough | 2001-05-01 |
| 6200412 | Chemical vapor deposition system including dedicated cleaning gas injection | Michael D. Kilgore, Wilbert van den Hoek, Christopher J. Rau, Bart J. van Schravendijk, Thomas W. Mountsier +1 more | 2001-03-13 |
| 5619103 | Inductively coupled plasma generating devices | Guifang Li | 1997-04-08 |
| 5511143 | Making polymer thin films for optical uses | Denice D. Denton | 1996-04-23 |
| 5304255 | Photovoltaic cell with photoluminescent plasma polymerized film | Guifang Li, Denice D. Denton | 1994-04-19 |
| 5217749 | Method of making polymer thin films for optical uses | Denice D. Denton | 1993-06-08 |