Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7558045 | Electrostatic chuck assembly with capacitive sense feature, and related operating method | Jaime Onate, Jimmy Lam, Timothy Kueper, Dan Ye | 2009-07-07 |
| 7144822 | High density plasma process for optimum film quality and electrical results | — | 2006-12-05 |
| 6200412 | Chemical vapor deposition system including dedicated cleaning gas injection | Wilbert van den Hoek, Christopher J. Rau, Bart J. van Schravendijk, Jeffrey Tobin, Thomas W. Mountsier +1 more | 2001-03-13 |