Issued Patents All Time
Showing 51–75 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9293523 | Method of forming III-V channel | Xinyu BAO | 2016-03-22 |
| 9279604 | Compact ampoule thermal management system | David K. Carlson, Kenric Choi, Marcel E. Josephson, Dennis L. Demars, Emre Cuvalci +1 more | 2016-03-08 |
| 9177815 | Methods for chemical mechanical planarization of patterned wafers | Yi-Chiau Huang, Gregory E. Menk, Bingxi Wood | 2015-11-03 |
| 9171718 | Method of epitaxial germanium tin alloy surface preparation | Yi-Chiau Huang | 2015-10-27 |
| 9159554 | Structure and method of forming metamorphic heteroepi materials and III-V channel structures on si | Xinyu BAO, Wonseok Lee, David K. Carlson, Zhiyuan Ye | 2015-10-13 |
| 9127360 | Epitaxial chamber with cross flow | Balasubramanian Ramachandran, Nyi O. Myo, Kevin Joseph Bautista, Harpreet Singh Juneja, Zuoming ZHU | 2015-09-08 |
| 9082684 | Method of epitaxial doped germanium tin alloy formation | Yi-Chiau Huang | 2015-07-14 |
| 9058988 | Methods for depositing layers having reduced interfacial contamination | Jean R. Vatus, Jinsong Tang, Yihwan Kim, Satheesh Kuppurao | 2015-06-16 |
| 9032990 | Chemical delivery system | Marcel E. Josephson, David K. Carlson, Steve Jumper | 2015-05-19 |
| 9029264 | Methods for depositing a tin-containing layer on a substrate | Yi-Chiau Huang | 2015-05-12 |
| 8999821 | Fin formation by epitaxial deposition | Adam Brand, Bingxi Wood, Yihwan Kim, Yi-Chiau Huang, John Boland | 2015-04-07 |
| 8991332 | Apparatus to control semiconductor film deposition characteristics | Satheesh Kuppurao, David K. Carlson, Manish Hemkar, Andrew Lam, Howard Beckford | 2015-03-31 |
| 8822312 | Method of forming high growth rate, low resistivity germanium film on silicon substrate | Yi-Chiau Huang, Xianzhi Tao | 2014-09-02 |
| 8759201 | Method of forming high growth rate, low resistivity germanium film on silicon substrate | Yi-Chiau Huang, Xianzhi Tao | 2014-06-24 |
| 8669590 | Methods and apparatus for forming silicon germanium-carbon semiconductor structures | Yi-Chiau Huang | 2014-03-11 |
| 8663390 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay +4 more | 2014-03-04 |
| 8658540 | Methods for low temperature conditioning of process chambers | Yi-Chiau Huang, David K. Carlson, Zhiyuan Ye | 2014-02-25 |
| 8652951 | Selective epitaxial germanium growth on silicon-trench fill and in situ doping | Yi-Chiau Huang, Jiping Li, Miao Jin, Bingxi Wood, Yihwan Kim | 2014-02-18 |
| 8647439 | Method of epitaxial germanium tin alloy surface preparation | Yi-Chiau Huang | 2014-02-11 |
| 8603898 | Method for forming group III/V conformal layers on silicon substrates | Xinyu BAO, David K. Carlson, Zhiyuan Ye | 2013-12-10 |
| 8524555 | Susceptor with backside area of constant emissivity | David K. Carlson, Craig Metzner | 2013-09-03 |
| 8501600 | Methods for depositing germanium-containing layers | Yi-Chiau Huang, David K. Carlson | 2013-08-06 |
| 8501594 | Methods for forming silicon germanium layers | Yi-Chiau Huang, Masato Ishii | 2013-08-06 |
| 8313804 | Apparatus and methods for chemical vapor deposition | David K. Carlson, Satheesh Kuppurao | 2012-11-20 |
| 8309440 | Method and apparatus for cleaning a substrate surface | Johanes S. Swenberg, David K. Carlson, Roisin L. Doherty | 2012-11-13 |