Issued Patents All Time
Showing 76–95 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8226770 | Susceptor with backside area of constant emissivity | David K. Carlson, Craig Metzner | 2012-07-24 |
| 8008166 | Method and apparatus for cleaning a substrate surface | Johanes S. Swenberg, David K. Carlson, Roisin L. Doherty | 2011-08-30 |
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay +4 more | 2011-07-12 |
| 7972663 | Method and apparatus for forming a high quality low temperature silicon nitride layer | Shulin Wang, Aihua Chen | 2011-07-05 |
| 7967911 | Apparatus and methods for chemical vapor deposition | David K. Carlson, Satheesh Kuppurao | 2011-06-28 |
| 7838431 | Method for surface treatment of semiconductor substrates | — | 2010-11-23 |
| 7737007 | Methods to fabricate MOSFET devices using a selective deposition process | Arkadii V. Samoilov, Yihwan Kim, Nicholas C. Dalida | 2010-06-15 |
| 7732269 | Method of ultra-shallow junction formation using Si film alloyed with carbon | Yihwan Kim, Majeed A. Foad, Yonah Cho, Zhiyuan Ye, Ali Zojaji | 2010-06-08 |
| 7718225 | Method to control semiconductor film deposition characteristics | Satheesh Kuppurao, David K. Carlson, Manish Hemkar, Andrew Lam, Howard Beckford | 2010-05-18 |
| 7709391 | Methods for in-situ generation of reactive etch and growth specie in film formation processes | Satheesh Kuppurao, David K. Carlson, Howard Beckford | 2010-05-04 |
| 7560352 | Selective deposition | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Yihwan Kim | 2009-07-14 |
| 7439142 | Methods to fabricate MOSFET devices using a selective deposition process | Arkadii V. Samoilov, Yihwan Kim, Nicholas C. Dalida | 2008-10-21 |
| 7365029 | Method for silicon nitride chemical vapor deposition | R. Suryanarayanan Iyer, Sean M. Seutter, Sanjeev Tandon, Shulin Wang | 2008-04-29 |
| 7172792 | Method for forming a high quality low temperature silicon nitride film | Shulin Wang, Aihua Chen | 2007-02-06 |
| 7132338 | Methods to fabricate MOSFET devices using selective deposition process | Arkadii V. Samoilov, Yihwan Kim, Nicholas C. Dalida | 2006-11-07 |
| 6991999 | Bi-layer silicon film and method of fabrication | Li Fu, Shulin Wang, Luo Lee, Steven Chen | 2006-01-31 |
| 6884464 | Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber | Lee Luo, R. Suryanarayanan Iyer, Janardhanan Anand Subramony, Xiaoliang Jin, Aihua Chen +4 more | 2005-04-26 |
| 6726955 | Method of controlling the crystal structure of polycrystalline silicon | Shulin Wang, Steven Chen, Lee Luo | 2004-04-27 |
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Henry Ho, Shulin Wang, Binh Tran, Alexander Tam +2 more | 2003-06-24 |
| 6559039 | Doped silicon deposition process in resistively heated single wafer chamber | Shulin Wang, Lee Luo, Steven Chen, Xianzhi Tao, Zoran Dragojlovic +1 more | 2003-05-06 |