Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9890455 | Pre-heat ring designs to increase deposition uniformity and substrate throughput | Nyi O. Myo, John S. Webb, Masato Ishii, Xuebin Li, Zhiyuan Ye | 2018-02-13 |
| 8586456 | Use of CL2 and/or HCL during silicon epitaxial film formation | Zhiyuan Ye, Yihwan Kim, Xiaowei Li, Nicholas C. Dalida, Jinsong Tang +2 more | 2013-11-19 |
| 8445389 | Etchant treatment processes for substrate surfaces and chamber surfaces | Arkadii V. Samoilov | 2013-05-21 |
| 8093154 | Etchant treatment processes for substrate surfaces and chamber surfaces | Arkadii V. Samoilov | 2012-01-10 |
| 8029620 | Methods of forming carbon-containing silicon epitaxial layers | Yihwan Kim, Zhiyuan Ye | 2011-10-04 |
| 7960256 | Use of CL2 and/or HCL during silicon epitaxial film formation | Zhiyuan Ye, Yihwan Kim, Xiaowei Li, Nicholas C. Dalida, Jinsong Tang +2 more | 2011-06-14 |
| 7732269 | Method of ultra-shallow junction formation using Si film alloyed with carbon | Yihwan Kim, Majeed A. Foad, Yonah Cho, Zhiyuan Ye, Errol Antonio C. Sanchez | 2010-06-08 |
| 7732305 | Use of Cl2 and/or HCl during silicon epitaxial film formation | Zhiyuan Ye, Yihwan Kim, Xiaowei Li, Nicholas C. Dalida, Jinsong Tang +2 more | 2010-06-08 |
| 7682940 | Use of Cl2 and/or HCl during silicon epitaxial film formation | Zhiyuan Ye, Yihwan Kim, Xiaowei Li, Nicholas C. Dalida, Jinsong Tang +2 more | 2010-03-23 |
| 7674337 | Gas manifolds for use during epitaxial film formation | David Masayuki Ishikawa, Craig Metzner, Yihwan Kim, Arkadii V. Samoilov | 2010-03-09 |
| 7651948 | Pre-cleaning of substrates in epitaxy chambers | Yihwan Kim, Jean R. Vatus, Lori D. Washington, Arkadii V. Samoilov | 2010-01-26 |
| 7598178 | Carbon precursors for use during silicon epitaxial film formation | Arkadii V. Samoilov, Rohini Kodali, Yihwan Kim | 2009-10-06 |
| 7195934 | Method and system for deposition tuning in an epitaxial film growth apparatus | Wolfgang Aderhold | 2007-03-27 |