SH

Silke Hamm

BC Beijing E-Town Semiconductor Technology Co.: 3 patents #27 of 72Top 40%
MT Mattson Technology: 1 patents #139 of 230Top 65%
Overall (All Time): #1,339,596 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12362194 Rapid thermal processing system with cooling system Manuel Sohn, Rolf Bremensdorfer, Dieter Hezler 2025-07-15
12176241 Support structure for thermal processing systems Manuel Sohn, Rolf Bremensdorfer, Alex Wansidler 2024-12-24
12068177 Rapid thermal processing system with cooling system Manuel Sohn, Rolf Bremensdorfer, Dieter Hezler 2024-08-20