| 12362194 |
Rapid thermal processing system with cooling system |
Rolf Bremensdorfer, Silke Hamm, Dieter Hezler |
2025-07-15 |
| 12352306 |
Workpiece support for a thermal processing system |
Rolf Bremensdorfer, Dieter Hezler |
2025-07-08 |
| 12308209 |
Workpiece processing apparatus with plasma and thermal processing systems |
Dieter Hezler, Keli Huang, Jianmin JI, Deqiang Zeng |
2025-05-20 |
| 12176241 |
Support structure for thermal processing systems |
Rolf Bremensdorfer, Silke Hamm, Alex Wansidler |
2024-12-24 |
| 12068177 |
Rapid thermal processing system with cooling system |
Rolf Bremensdorfer, Silke Hamm, Dieter Hezler |
2024-08-20 |
| 11955315 |
Workpiece processing apparatus with plasma and thermal processing systems |
Dieter Hezler, Keli Huang, Jianmin JI, Deqiang Zeng |
2024-04-09 |