US

Uwe Shellhorn

CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
Overall (All Time): #3,125,957 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8836929 Device and method for the optical measurement of an optical system by using an immersion fluid Ulrich Wegmann, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever, Markus Goeppert +1 more 2014-09-16