Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114293 | Illumination system and projection objective of a mask inspection apparatus | Heiko Feldmann, Erik Matthias Sohmen, Oswald Gromer, Ulrich Mueller, Michael Layh +1 more | 2018-10-30 |
| 10042271 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Oswald Gromer, Rolf Freimann, Paul Kaufmann, Bernhard Geuppert | 2018-08-07 |
| 9696639 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Oswald Gromer, Rolf Freimann, Paul Kaufmann, Bernhard Geuppert | 2017-07-04 |
| 9001304 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Oswald Gromer, Rolf Freimann, Paul Kaufmann, Bernhard Geuppert | 2015-04-07 |
| 8988752 | Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatus | Marten Krebs, Gerhard Huber, Uwe Schellhorn | 2015-03-24 |
| 8836929 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Shellhorn, Albrecht Ehrmann, Martin Schriever, Markus Goeppert +1 more | 2014-09-16 |
| 8120763 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Schellhorn, Albrecht Ehrmann, Martin Schriever, Markus Goeppert +1 more | 2012-02-21 |
| 7755748 | Device and method for range-resolved determination of scattered light, and an illumination mask | Michael Arnz, Oswald Gromer, Gerd Klose, Matthias Manger | 2010-07-13 |
| 7408631 | Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask | Michael Arnz, Oswald Gromer, Gerd Klose, Matthias Manger | 2008-08-05 |
| 7408652 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Schellhorn, Helmut Haidner, Albrecht Ehrmann, Martin Schriever +1 more | 2008-08-05 |
| 7019824 | Moire method and measuring system for measuring the distortion of an optical imaging system | Ulrich Wegmann, Uwe Schellhorn, Ralph Klaesges | 2006-03-28 |