Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114293 | Illumination system and projection objective of a mask inspection apparatus | Heiko Feldmann, Erik Matthias Sohmen, Joachim Stuehler, Ulrich Mueller, Michael Layh +1 more | 2018-10-30 |
| 10042271 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Rolf Freimann, Paul Kaufmann, Bernhard Geuppert | 2018-08-07 |
| 9696639 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Rolf Freimann, Paul Kaufmann, Bernhard Geuppert | 2017-07-04 |
| 9001304 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Rolf Freimann, Paul Kaufmann, Bernhard Geuppert | 2015-04-07 |
| 8052627 | Spray nozzle and dental cleaning system | Andreas Kramp, Michael Sauer, Michael Stolper, Norbert Schaefer, Karl Herzog | 2011-11-08 |
| 7755748 | Device and method for range-resolved determination of scattered light, and an illumination mask | Michael Arnz, Gerd Klose, Joachim Stuehler, Matthias Manger | 2010-07-13 |
| 7408631 | Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask | Michael Arnz, Gerd Klose, Joachim Stuehler, Matthias Manger | 2008-08-05 |