Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774870 | Method for removing a particle from a mask system | Sergey Oshemkov, Shao-Chi Wei, Joerg Frederik Blumrich, Thomas Scheruebl | 2023-10-03 |
| 11269260 | Method and assembly for characterizing a mask or a wafer for microlithography | Michael Carl | 2022-03-08 |
| 11003090 | Lithography apparatus comprising a plurality of individually controllable write heads | Stefan Richter, Enrico Geissler, Dirk Doering, Lakshmanan Senthil Kumar, Guenter Rudolph +1 more | 2021-05-11 |
| 7733564 | Applications of adaptive optics in microscopy | Ralf Wolleschensky, Robert Grub, Ulrich Simon, Martin Gluch, Andreas Faulstich | 2010-06-08 |
| 7335866 | Method for improving depth discrimination in optical reproduction systems | Bernhard Backs, Joerg Schaffer, Lutz Schaefer | 2008-02-26 |
| 6771417 | Applications of adaptive optics in microscopy | Ralf Wolleschensky, Robert Grub, Ulrich Simon, Martin Gluch, Andreas Faulstich | 2004-08-03 |
| 6545263 | Scanning probe microscope with probe integrated in an optical system | Ralph Lange, Torsten Antrack | 2003-04-08 |