Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12282260 | Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask | Yu-Hsin Hsu, Hao-Ming Chang, Shao-Chi Wei, Cheng-Ming Lin | 2025-04-22 |
| 11953448 | Method for defect inspection | Tsun-Cheng Tang, Hao-Ming Chang, Cheng-Ming Lin | 2024-04-09 |
| 11567400 | Method of fabricating a photomask and method of inspecting a photomask | Tsun-Cheng Tang, Cheng-Ming Lin, Hao-Ming Chang, Way-Len Chang | 2023-01-31 |
| 11209736 | Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask | Yu-Hsin Hsu, Hao-Ming Chang, Shao-Chi Wei, Cheng-Ming Lin | 2021-12-28 |
| 11048163 | Inspection method of a photomask and an inspection system | Tsun-Cheng Tang, Cheng-Ming Lin, Hao-Ming Chang, Waylen Chang | 2021-06-29 |
| 10508953 | Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication | Min-An Yang, Hao-Ming Chang, Shao-Chi Wei, Kuo-Chin Lin, Li-Chih Lu +1 more | 2019-12-17 |
| 10459332 | Mask blank and fabrication method thereof, and method of fabricating photomask | Hao-Ming Chang, Chih-Ming Chen, Cheng-Ming Lin, Shao-Chi Wei, Hsao Shih +1 more | 2019-10-29 |
| 10101651 | Photo mask assembly and optical apparatus including the same | Shao-Chi Wei, Cheng-Ming Lin, Yu-Hsin Hsu, Hao-Ming Chang | 2018-10-16 |