Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399440 | Lithography system and methods | Chen-Pin Cheng, Guo-Chih Yen | 2025-08-26 |
| 11953448 | Method for defect inspection | Hao-Ming Chang, Sheng-Chang Hsu, Cheng-Ming Lin | 2024-04-09 |
| 11567400 | Method of fabricating a photomask and method of inspecting a photomask | Cheng-Ming Lin, Sheng-Chang Hsu, Hao-Ming Chang, Way-Len Chang | 2023-01-31 |
| 11048163 | Inspection method of a photomask and an inspection system | Cheng-Ming Lin, Sheng-Chang Hsu, Hao-Ming Chang, Waylen Chang | 2021-06-29 |
| 6627363 | Utilizing vacuum ultraviolet (VUV) exposure to remove halos of carbon deposition in clear reticle repair | Vincent Wen, Tung Kang, Chih-Sheng Chen, Jun-Hsien Chiou | 2003-09-30 |