Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7097948 | Method for repair of photomasks | Wu-Hung Ko, Chih-Wei Wen | 2006-08-29 |
| 6627363 | Utilizing vacuum ultraviolet (VUV) exposure to remove halos of carbon deposition in clear reticle repair | Vincent Wen, Chih-Sheng Chen, Jun-Hsien Chiou, Tsun-Cheng Tang | 2003-09-30 |