Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422744 | Photomask inspection method and apparatus thereof | Hsin-Fu Tseng, Chien-Lin Chen | 2025-09-23 |
| 12405527 | Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomask | Tzu Han Liu, Chung-Hung Lin | 2025-09-02 |
| 12399439 | Pellicle, pellicle removal tool, and method of utilizing pellicle and pellicle removal tool | Hsuan Jung Chang, Kun-Lung Hsieh, Ting-Hsien Ko | 2025-08-26 |
| 12400890 | Apparatus for fabricating a semiconductor device and method for fabricating semiconductor device | Po-Chien Huang, Chung-Hung Lin | 2025-08-26 |
| 12282264 | Cleaning apparatus for cleaning surface of photomask | Ting-Hsien Ko, Chung-Hung Lin | 2025-04-22 |
| 12242182 | Method for removing particles from pellicle and photomask | Tzu Han Liu, Chung-Hung Lin | 2025-03-04 |
| 12189283 | Particle prevention method in reticle pod | Tzu Han Liu, Chung-Hung Lin | 2025-01-07 |
| 12153341 | Cleaning method, method for forming semiconductor structure and system thereof | Wu-Hung Ko, Chung-Hung Lin | 2024-11-26 |
| 12124758 | Multi-host system and operation sharing method | Huan Ge, Feng-Chang Lo | 2024-10-22 |
| 12085848 | Photomask cleaning tool | Pin-Cheng CHEN, Chung-Hung Lin, Ting-Hsien Ko | 2024-09-10 |
| 12072621 | Photomask inspection method and apparatus thereof | Hsin-Fu Tseng, Chien-Lin Chen | 2024-08-27 |
| 12009238 | Apparatus for fabricating a semiconductor device and method for fabricating semiconductor device | Po-Chien Huang, Chung-Hung Lin | 2024-06-11 |
| 11822231 | Method for removing particles from pellicle and photomask | Tzu Han Liu, Chung-Hung Lin | 2023-11-21 |
| 11809076 | Cleaning method, method for forming semiconductor structure and system thereof | Wu-Hung Ko, Chung-Hung Lin | 2023-11-07 |
| 11703752 | Method of accelerated hazing of mask assembly | Wu-Hung Ko, Kun-Lung Hsieh | 2023-07-18 |
| 11703754 | Particle prevention method in reticle pod | Tzu Han Liu, Chung-Hung Lin | 2023-07-18 |
| 11614684 | Photomask inspection method and apparatus thereof | Hsin-Fu Tseng, Chien-Lin Chen | 2023-03-28 |
| 11585832 | Probe card and probe module thereof | Chung-Yen Huang, Sheng-Feng Xu, Fuh-Chyun Tang, Chih-Hao Ho | 2023-02-21 |
| 11347143 | Cleaning method, method for forming semiconductor structure and system thereof | Wu-Hung Ko, Chung-Hung Lin | 2022-05-31 |
| 11340524 | Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomask | Tzu Han Liu, Chung-Hung Lin | 2022-05-24 |
| 11294275 | Apparatus for mounting a pellicle to a photomask and method for mounting a pellicle to a photomask | Tzu Han Liu, Chung-Hung Lin | 2022-04-05 |
| 11239001 | Method for generating extreme ultraviolet radiation and an extreme ultraviolet (EUV) radiation source | Tzu Han Liu, Chung-Hung Lin | 2022-02-01 |
| 11088003 | Apparatus for fabricating a semiconductor device and method for fabricating semiconductor device | Po-Chien Huang, Chung-Hung Lin | 2021-08-10 |
| 10983430 | Mask assembly and haze acceleration method | Wu-Hung Ko, Kun-Lung Hsieh | 2021-04-20 |
| 10775694 | Apparatus for mounting a pellicle to a photomask and method for mounting a pellicle to a photomask | Tzu Han Liu, Chung-Hung Lin | 2020-09-15 |