Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405527 | Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomask | Chih-Wei Wen, Chung-Hung Lin | 2025-09-02 |
| 12242182 | Method for removing particles from pellicle and photomask | Chih-Wei Wen, Chung-Hung Lin | 2025-03-04 |
| 12189283 | Particle prevention method in reticle pod | Chih-Wei Wen, Chung-Hung Lin | 2025-01-07 |
| 11822231 | Method for removing particles from pellicle and photomask | Chih-Wei Wen, Chung-Hung Lin | 2023-11-21 |
| 11703754 | Particle prevention method in reticle pod | Chih-Wei Wen, Chung-Hung Lin | 2023-07-18 |
| 11340524 | Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomask | Chih-Wei Wen, Chung-Hung Lin | 2022-05-24 |
| 11294275 | Apparatus for mounting a pellicle to a photomask and method for mounting a pellicle to a photomask | Chih-Wei Wen, Chung-Hung Lin | 2022-04-05 |
| 11239001 | Method for generating extreme ultraviolet radiation and an extreme ultraviolet (EUV) radiation source | Chih-Wei Wen, Chung-Hung Lin | 2022-02-01 |
| 10775694 | Apparatus for mounting a pellicle to a photomask and method for mounting a pellicle to a photomask | Chih-Wei Wen, Chung-Hung Lin | 2020-09-15 |