Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386297 | Method and apparatus for examining an element of a photolithographic mask for the EUV range | Johannes Ruoff | 2019-08-20 |
| 10108085 | Method for localizing defects on substrates | Jan Hendrik Peters, Dirk Seidel, Christoph Husemann | 2018-10-23 |