Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9910193 | Reflective optical element and EUV lithography appliance | Johann Trenkler, Hans-Juergen Mann | 2018-03-06 |
| 8891163 | Reflective optical element and EUV lithography appliance | Johann Trenkler, Hans-Juergen Mann | 2014-11-18 |
| 8537460 | Reflective optical element and EUV lithography appliance | Johann Trenkler, Hans-Jurgen Mann | 2013-09-17 |
| 8243364 | Reflective optical element and EUV lithography appliance | Johann Trenkler, Hans-Juergen Mann | 2012-08-14 |
| 7952797 | Reflective optical element and EUV lithography appliance | Johann Trenkler, Hans-Jurgen Mann | 2011-05-31 |
| 5905203 | Micromechanical acceleration sensor | Georg Flach, Gunther Schuster, Heribert Weber | 1999-05-18 |
| 5623099 | Two-element semiconductor capacitive acceleration sensor | Gunther Schuster | 1997-04-22 |