Issued Patents All Time
Showing 51–75 of 119 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8810927 | Projection objective and projection exposure apparatus with negative back focus of the entry pupil | Wolfgang Singer | 2014-08-19 |
| 8804234 | Catadioptric projection objective including an aspherized plate | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Alexander Epple | 2014-08-12 |
| 8730572 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Alexander Epple +2 more | 2014-05-20 |
| 8717538 | Catoptric imaging optical system with an arc-shaped object field | — | 2014-05-06 |
| 8711472 | Optical imaging device and imaging method for microscopy | Heiko Feldmann | 2014-04-29 |
| 8693098 | Projection objective for a microlithographic EUV projection exposure apparatus | Siegfried Rennon, Thomas Schicketanz | 2014-04-08 |
| 8643824 | Projection optics for microlithography | — | 2014-02-04 |
| 8632195 | Catoptric objectives and systems using catoptric objectives | David Shafer, Wilhelm Ulrich | 2014-01-21 |
| 8629972 | Projection objective for microlithography | Johannes Zellner, Martin Endres | 2014-01-14 |
| 8614785 | Microlithography projection system with an accessible diaphragm or aperture stop | — | 2013-12-24 |
| 8610877 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | David Shafer | 2013-12-17 |
| 8610876 | Reflective optical element, projection system, and projection exposure apparatus | — | 2013-12-17 |
| 8605255 | Imaging optical system and projection exposure system including the same | Wilhelm Ulrich, Stephan Muellender, Hartmut Enkisch | 2013-12-10 |
| 8576376 | Imaging optical system and projection exposure system for microlithography | — | 2013-11-05 |
| 8558991 | Imaging optical system and related installation and method | — | 2013-10-15 |
| 8436985 | Combination stop for catoptric projection arrangement | Daniel Kraehmer, Aurelian Dodoc, Toralf Gruner | 2013-05-07 |
| 8416490 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Alexander Epple +2 more | 2013-04-09 |
| 8363315 | Catadioptric projection objective with mirror group | Alexander Epple, Wilhelm Ulrich, Aurelian Dodoc, David Shafer | 2013-01-29 |
| 8355201 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Alexander Epple +2 more | 2013-01-15 |
| 8345267 | Apparatus for microlithographic projection exposure and apparatus for inspecting a surface of a substrate | Wolfgang Singer | 2013-01-01 |
| 8339701 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Alexander Epple | 2012-12-25 |
| 8317345 | Catoptric objectives and systems using catoptric objectives | David Shafer, Wilhelm Ulrich | 2012-11-27 |
| 8289619 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Alexander Epple | 2012-10-16 |
| 8279404 | Projection objective having mirror elements with reflective coatings | Danny Chan, Sascha Migura | 2012-10-02 |
| 8268518 | Method and lithography device with a mask reflecting light | Martin Lowisch, Wolfgang Singer | 2012-09-18 |