Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105427 | Method and device for correcting a telecentricity error of an imaging device | Jochen Hetzler | 2024-10-01 |
| 9785058 | Method for ascertaining distortion properties of an optical system in a measurement system for microlithography | Dirk Seidel, Michael Himmelhaus | 2017-10-10 |