Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10599936 | Method for correcting the distortion of a first imaging optical unit of a first measurement system | Dirk Seidel, Carsten Schmidt | 2020-03-24 |
| 10429731 | Method and device for generating a reference image in the characterization of a mask for microlithography | Carsten Schmidt | 2019-10-01 |
| 9785058 | Method for ascertaining distortion properties of an optical system in a measurement system for microlithography | Dirk Seidel, Susanne Toepfer | 2017-10-10 |
| 8586142 | Method and apparatus for producing small structures | Oliver Worsfold, Conor D. Whitehouse | 2013-11-19 |
| 8502972 | Clusters of microresonators for cavity mode optical sensing | Alexandre Francois | 2013-08-06 |
| 8471217 | Fluorescent non-metallic particles encapsulated in a metallic coating | — | 2013-06-25 |
| 8288166 | Sensor chip with connected non-metallic particles comprising a metallic coating | Reiner Dahint, Petra Bücker, Elka Trivela, Sören Schilp, Hatice Acunman | 2012-10-16 |
| 6756014 | Biochemical sensor and biochemical testing system using the same | Kenko Uchida, Hiroyuki Takei | 2004-06-29 |