Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8269948 | Projection exposure apparatus and optical system | Sascha Bleidistel | 2012-09-18 |
| 8169595 | Optical apparatus and method for modifying the imaging behavior of such apparatus | Martin Schriever, Ulrich Wegmann, Stefan Hembacher, Juergen Huber, Norbert Kerwien +2 more | 2012-05-01 |
| 7826155 | Vibration damping for photolithographic lens mount | Leonhard Soell | 2010-11-02 |
| 7760327 | Reflecting optical element with eccentric optical passageway | Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber +8 more | 2010-07-20 |
| 7724351 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Erik Roelof Loopstra, Adrianus Franciscus Petrus Engelen, Bernardus Antonius Johannes Luttikhuis, Maria Johanna Agnes Rubingh, Johannes Martinus Andreas Hazenberg +7 more | 2010-05-25 |
| 7692881 | Structure for use in a projection exposure system for manufacturing semiconductors | Yim-Bun Patrick Kwan, Nico Kemper | 2010-04-06 |
| 7581305 | Method of manufacturing an optical component | Jens Kugler, Thomas Ittner, Bernd Geh, Rolf Freimann, Guenther Seitz +3 more | 2009-09-01 |
| 7410265 | Focusing-device for the radiation from a light source | Martin Antoni, Frank Melzer, Andreas Seifert, Wolfgang Singer, Wilhelm Egle +1 more | 2008-08-12 |
| 7321126 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2008-01-22 |
| 7091505 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2006-08-15 |