Issued Patents All Time
Showing 26–50 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10007193 | Projection exposure apparatus and method for controlling a projection exposure apparatus | Michael Patra | 2018-06-26 |
| 9983483 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Frank Schlesener, Markus Schwab | 2018-05-29 |
| 9977334 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Vladimir Davydenko, Thomas Korb, Johannes Eisenmenger | 2018-05-22 |
| 9977333 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Michael Layh | 2018-05-22 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Ralf Scharnweber, Olaf Dittmann, Toralf Gruner, Gundula Weiss +5 more | 2018-04-17 |
| 9933706 | Illumination system of a microlithographic projection exposure apparatus | Damian Fiolka, Gerhard-Wilhelm Ziegler | 2018-04-03 |
| 9933704 | Microlithography illumination optical system and microlithography projection exposure apparatus including same | Michael Patra, Michael Layh | 2018-04-03 |
| 9910360 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Vladimir Davydenko, Thomas Korb, Johannes Eisenmenger | 2018-03-06 |
| 9910359 | Illumination system of a microlithographic projection exposure apparatus | Vladimir Davydenko, Thomas Korb, Frank Schlesener, Stefanie Hilt, Wolfgang Hoegele | 2018-03-06 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger +6 more | 2018-02-20 |
| 9823577 | Facet mirror for a projection exposure apparatus | Michael Patra | 2017-11-21 |
| 9810992 | Illumination system | — | 2017-11-07 |
| 9810890 | Collector | — | 2017-11-07 |
| 9804499 | Illumination system of a microlithographic projection exposure apparatus | — | 2017-10-31 |
| 9791784 | Assembly for a projection exposure apparatus for EUV projection lithography | Michael Patra, Stig Bieling, Johannes Wangler | 2017-10-17 |
| 9696631 | Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system | Bernhard Kneer, Toralf Gruner | 2017-07-04 |
| 9671548 | Optical waveguide for guiding illumination light | Christian Wald, Stefan Schaff, Daniel Runde | 2017-06-06 |
| 9665010 | Method for operating a microlithographic projection exposure apparatus | — | 2017-05-30 |
| 9651875 | Illumination system and lithographic apparatus | Heine Melle Mulder, Steven George Hansen, Johannes Catharinus Hubertus Mulkens | 2017-05-16 |
| 9645501 | Illumination optical unit for EUV projection lithography, and optical system comprising such an illumination optical unit | Michael Patra | 2017-05-09 |
| 9606441 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2017-03-28 |
| 9599904 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Michael Layh | 2017-03-21 |
| 9588431 | Illumination optics and projection exposure apparatus | Artur Hoegele | 2017-03-07 |
| 9581911 | Polarization-modulating optical element | Damian Fiolka | 2017-02-28 |
| 9581910 | Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus | Frank Schlesener, Ingo Saenger, Olaf Dittmann, Aksel Goehnermeier, Alexandra Pazidis +2 more | 2017-02-28 |