Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415892 | Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus | Matthias KAES, Matthias Manger, Christoph Petri, Pavel Alexeev, Walter Pauls | 2022-08-16 |
| 11162778 | Method for determining material removal and device for the beam machining of a workpiece | Stephan Six | 2021-11-02 |