Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422743 | Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method | Renzo Capelli, Markus Koch, Dirk Hellweg, Walter Pauls, Grizelda Kersteen | 2025-09-23 |
| 12372431 | Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured | Markus Koch, Renzo Capelli, Dmitry Simakov | 2025-07-29 |
| 12158703 | Method for reproducing a target wavefront of an imaging optical production system, and metrology system for carrying out the method | Lukas Fischer, Markus Koch, Mario Laengle, Daniel Pagel | 2024-12-03 |
| 11796926 | Metrology system for examining objects with EUV measurement light | Renzo Capelli | 2023-10-24 |
| 11255791 | Method of and apparatus for spatially measuring nano-scale structures | Stefan W. Hell, Yvan Eilers, Francisco Balzarotti | 2022-02-22 |
| 10962479 | Method of high spatial resolution determining a position of a singularized molecule which is excitable for emission of luminescence light | Francisco Balzarotti, Yvan Eilers, Stefan W. Hell | 2021-03-30 |
| 10908089 | Method of high spatial resolution determining a position of a singularized molecule which is excitable for emission of luminescence light | Francisco Balzarotti, Yvan Eilers, Stefan W. Hell | 2021-02-02 |
| 10900901 | Method of high spatial resolution determining a position of a singularized molecule which is excitable for emission of luminescence light | Francisco Balzarotti, Yvan Eilers, Stefan W. Hell | 2021-01-26 |
| 10794829 | Method of and apparatus for spatially measuring nano-scale structures | Stefan W. Hell, Yvan Eilers, Francisco Balzarotti | 2020-10-06 |