Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158703 | Method for reproducing a target wavefront of an imaging optical production system, and metrology system for carrying out the method | Lukas Fischer, Klaus Gwosch, Markus Koch, Daniel Pagel | 2024-12-03 |
| 11647288 | Device for measuring masks for microlithography and autofocusing method | — | 2023-05-09 |
| 10578881 | Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit | Thomas Frank, Dirk Doering, Holger Seitz, Ulrich Matejka | 2020-03-03 |
| 10168539 | Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit | Thomas Frank, Dirk Doering, Holger Seitz, Ulrich Matejka | 2019-01-01 |
| 9904060 | Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit | Thomas Frank, Dirk Doering, Holger Seitz, Ulrich Matejka | 2018-02-27 |
| 9366637 | Method for establishing distortion properties of an optical system in a microlithographic measurement system | — | 2016-06-14 |
| 8970951 | Mask inspection microscope with variable illumination setting | Ulrich Matejka, Holger Seitz, Norbert Rosenkranz | 2015-03-03 |
| 8717581 | Method for determining the position of a structure within an image and position measuring device for carrying out the method | — | 2014-05-06 |