Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470872 | Reflective optical element | Boris Bittner, Norbert Wabra, Sonja Schneider, Hendrik Wagner, Rumen Iliew +1 more | 2016-10-18 |
| 9134613 | Illumination and displacement device for a projection exposure apparatus | Sonja Schneider, Norbert Wabra, Martin von Hodenberg, Boris Bittner | 2015-09-15 |