Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001631 | Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner +6 more | 2018-06-19 |
| 9709770 | Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatus | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner +1 more | 2017-07-18 |
| 9470872 | Reflective optical element | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schneider, Hendrik Wagner +1 more | 2016-10-18 |
| 9348234 | Microlithographic apparatus | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Martin von Hodenberg +1 more | 2016-05-24 |