Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288272 | Method for determining a production aerial image of an object to be measured | Renzo Capelli | 2025-04-29 |
| 11061331 | Method for determining a structure-independent contribution of a lithography mask to a fluctuation of the linewidth | Markus Koch, Dirk Hellweg, Renzo Capelli | 2021-07-13 |
| 10564551 | Method for determining a focus position of a lithography mask and metrology system for carrying out such a method | Markus Koch, Dirk Hellweg, Renzo Capelli | 2020-02-18 |
| 10481505 | Method for determining an imaging aberration contribution of an imaging optical unit for measuring lithography masks | Markus Koch, Dirk Hellweg, Renzo Capelli | 2019-11-19 |