Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164234 | Actuator device and method for aligning an optical element, optical assembly and projection exposure apparatus | — | 2024-12-10 |
| 10495845 | Tilting an optical element | — | 2019-12-03 |
| 10215953 | Tilting an optical element | — | 2019-02-26 |
| 9482959 | EUV microlithography illumination optical system and EUV attenuator for same | Nicolas Schmidts, Joachim Hartjes, Ulrich Bingel | 2016-11-01 |
| 9423590 | Liquid cooled EUV reflector | Joachim Hartjes, Damian Fiolka | 2016-08-23 |
| 9274256 | Systems for aligning an optical element and method for same | — | 2016-03-01 |
| 8665419 | Device for an optical arrangement and method for positioning an optical element of an optical arrangement | — | 2014-03-04 |