Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8094287 | Lithographic appararus and method | Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver, Bauke Jansen +1 more | 2012-01-10 |
| 8027024 | Replacement device for an optical element | Ulrich Weber | 2011-09-27 |
| 8027023 | Optical imaging device and method for reducing dynamic fluctuations in pressure difference | Stefan Hembacher, Jens Kugler, Sascha Bleidistel | 2011-09-27 |
| 8009343 | Optical imaging device having at least one system diaphragm | Thomas C. Bischoff, Hermann Bieg, Martin Huber, Francois Henzelin, Gerhard Szekely +2 more | 2011-08-30 |
| 7986472 | Optical element module | Jens Kugler, Ulrich Weber, Yim-Bun Patrick Kwan, Peter Deufel | 2011-07-26 |
| 7760327 | Reflecting optical element with eccentric optical passageway | Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber +8 more | 2010-07-20 |
| 7656595 | Adjustment arrangement of an optical element | Klaus Beck, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl | 2010-02-02 |
| 7649702 | Immersion lithography objective | Paul Graeupner, Juergen Fischer, Andreas Wurmbrand, Bauke Jansen, Bob Streefkerk +2 more | 2010-01-19 |
| 7570343 | Microlithographic projection exposure apparatus | Aurelian Dodoc, Karl-Heinz Schuster, Joerg Mallmann, Wilhelm Ulrich, Hans-Juergen Rostalski +6 more | 2009-08-04 |
| 7545483 | Optical element unit for exposure processes | Jens Kugler, Thomas Schletterer, Guido Limbach, Julian Kaller, Hans-Juergen Scherle +2 more | 2009-06-09 |
| 7457059 | Adjustment arrangement of an optical element | Klaus Beck, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl | 2008-11-25 |
| 7410265 | Focusing-device for the radiation from a light source | Martin Antoni, Frank Melzer, Andreas Seifert, Wolfgang Singer, Wilhelm Egle +1 more | 2008-08-12 |
| 7400460 | Method for connection of an optical element to a mount structure | Hubert Holderer, Dirk Rexhaeuser | 2008-07-15 |
| 7321126 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2008-01-22 |
| 7295331 | Optical element with an optical axis | Thomas Petasch, Hartmut Muenker | 2007-11-13 |
| 7193794 | Adjustment arrangement of an optical element | Klaus Beck, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl | 2007-03-20 |
| 7091505 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2006-08-15 |
| 6897599 | System for damping oscillations | Franz Sorg, Stefan Xalter, Frank Melzer, Michael Muehlbeyer | 2005-05-24 |
| 6844994 | Optical element deformation system | Frank Melzer, Michael Mühlbeyer, Franz Sorg, Stefan Xalter, Thomas Ittner | 2005-01-18 |
| 6842294 | Catadioptric objective | Hubert Holderer, Ulrich Weber, Alexander Kohl, Toralf Gruner, Christoph Zaczek +3 more | 2005-01-11 |
| 6816325 | Mounting apparatus for an optical element | Jochen Becker, Werner Lang, Alexander Kohl, Sascha Kraus | 2004-11-09 |
| 6744574 | Mount for an optical element in an optical imaging device | Ulrich Weber, Jochen Becker, Hubert Holderer, Jens Kugler | 2004-06-01 |
| 6700715 | Oscillation damping system | Franz Sorg, Stefan Xalter, Michael Muehlbeyer, Frank Melzer, Thomas Ittner | 2004-03-02 |
| 6594093 | Adjusting apparatus for an optical element in a lens system | Timo Moeller | 2003-07-15 |
| 6580570 | Mounting apparatus for an optical element | Jochen Becker, Werner Lang, Alexander Kohl, Sascha Kraus | 2003-06-17 |