Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7729065 | Optical element unit | Johannes Rau | 2010-06-01 |
| 7564636 | Device for preventing the displacement of an optical element | Christian Zengerling, Ulrich Weber | 2009-07-21 |
| 7551375 | Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly | Johannes Rau, Josef Distl, Hubert Holderer | 2009-06-23 |
| 7239462 | Objective with at least one optical element | Johannes Rau, Ulrich Weber | 2007-07-03 |
| 7079331 | Device for holding a beam splitter element | Ulrich Weber, Alexander Kohl, Hubert Holderer, Erwin Gaber, Winfried Kaiser +5 more | 2006-07-18 |