| 10120293 |
Object positioning in lithography |
Ramidin Izair Kamidi, Yanin Kasemsinsup |
2018-11-06 |
| 9977349 |
Support device, lithographic apparatus and device manufacturing method |
Cornelius Adrianus Lambertus De Hoon, Ingmar August Kerp, Pieter Johannes Gertrudis Meijers, Jeroen Pieter Starreveld, Derk Ten Hoopen +4 more |
2018-05-22 |
| 9946168 |
Lithographic apparatus |
— |
2018-04-17 |
| 9927721 |
Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method |
Wilhelmus Henricus Theodorus Maria Aangenent, Nic Jasper Dirkx, Ramidin Izair Kamidi, Wilhelmus Franciscus Johannes Simons |
2018-03-27 |
| 9754711 |
Vibration isolator with displacement structure |
Jeroen Lodevicus Gerardus Janssen, Johannes Jacobus Hubertus Paulides, Elena Andreevna Lomonova, Dave Theodorus Everardus Henricus Van Casteren |
2017-09-05 |
| 9753381 |
Substrate table system, lithographic apparatus and substrate table swapping method |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam, Erik Roelof Loopstra |
2017-09-05 |
| 9746312 |
Lithographic apparatus and method for measuring a position |
Engelbertus Antonius Fransiscus Van Der Pasch |
2017-08-29 |
| 9740107 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2017-08-22 |
| 9726988 |
Multi-stage system, a control method therefor, and a lithographic apparatus |
Johannes Petrus Martinus Bernardus Vermeulen |
2017-08-08 |
| 9715171 |
Imprint lithographic apparatus and imprint lithographic method |
Johannes Petrus Martinus Bernardus Vermeulen, Marc Wilhelmus Maria Van Der Wijst, Jeroen Pieter Starreveld, Cornelius Adrianus Lambertus De Hoon, Francois Xavier Debiesme |
2017-07-25 |
| 9696630 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Erik Roelof Loopstra, Bernhard Geuppert, Marco Hendrikus Hermanus Oude Nijhuis, Rodolfo Guglielmi Rabe +2 more |
2017-07-04 |
| 9671702 |
Positioning system, a lithographic apparatus and a method for positional control |
Henrikus Herman Marie Cox |
2017-06-06 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2017-01-10 |
| 9494869 |
Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot +9 more |
2016-11-15 |
| 9442394 |
Multi-stage system, a control method therefor, and a lithographic apparatus |
Johannes Petrus Martinus Bernardus Vermeulen |
2016-09-13 |
| 9378722 |
Lithographic apparatus with actuator to compensate acoustic vibration |
Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Peter Paul HEMPENIUS, Youssef Karel Maria De Vos, Joost De Pee +5 more |
2016-06-28 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2016-06-14 |
| 9329501 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method |
Yang-Shan Huang, Jan Van Eijk, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven +3 more |
2016-05-03 |
| 9304404 |
Arrangement for actuating an element in a microlithographic projection exposure apparatus |
Juergen Fischer, Ulrich Schoenhoff, Bernhard Geuppert, Robertus Johannes Marinus De Jongh |
2016-04-05 |
| 9261799 |
Movable support, position control system, lithographic apparatus and method of controlling a position of an exchangeable object |
— |
2016-02-16 |
| 9229339 |
Positioning system, a lithographic apparatus and a method for positional control |
Henrikus Herman Marie Cox |
2016-01-05 |
| 9195128 |
Enhancing alignment in lithographic apparatus device manufacture |
— |
2015-11-24 |
| 9164401 |
Projection system and lithographic apparatus |
Erik Roelof Loopstra, Wilhelmus Petrus De Boeij, Robertus Johannes Marinus De Jongh, Jan Bernard Plechelmus Van Schoot, Timotheus Franciscus Sengers +2 more |
2015-10-20 |
| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-10-06 |
| 9134632 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Yim-Bun Patrick Kwan, Erik Roelof Loopstra, Bernhard Geuppert, Marco Hendrikus Hermanus Oude Nijhuis +2 more |
2015-09-15 |