Issued Patents All Time
Showing 76–100 of 152 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9128390 | Multi-stage system, a control method therefor, and a lithographic apparatus | Johannes Petrus Martinus Bernardus Vermeulen | 2015-09-08 |
| 9122173 | Positioning system, lithographic apparatus and device manufacturing method | Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens, Marc Wilhelmus Maria Van Der Wijst +4 more | 2015-09-01 |
| 9116423 | Imprint lithography apparatus | Andre Bernardus Jeunink, Vadim Yevgenyevich Banine, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen, Yvonne Wendela Kruijt-Stegeman | 2015-08-25 |
| 9110387 | Lithographic apparatus comprising a substrate table and a surface substrate actuator | Jan Van Eijk, Sven Antoin Johan Hol, Johannes Petrus Martinus Bernardus Vermeulen, Yang-Shan Huang | 2015-08-18 |
| 9081299 | Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2015-07-14 |
| 9057967 | Lithographic apparatus and device manufacturing method | Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more | 2015-06-16 |
| 8994919 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Cornelius Adrianus Lambertus De Hoon | 2015-03-31 |
| 8928861 | Lithographic apparatus | Doede Frans Kuiper | 2015-01-06 |
| 8922749 | Lithographic apparatus and patterning device | Erik Roelof Loopstra | 2014-12-30 |
| 8913229 | Multi-stage system, a control method therefor, and a lithographic apparatus | Johannes Petrus Martinus Bernardus Vermeulen | 2014-12-16 |
| 8908146 | Actuator system, lithographic apparatus, and device manufacturing method | — | 2014-12-09 |
| 8854607 | Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method | Ramidin Izair Kamidi, Martijn Houkes, Marinus Maria Johannes Van De Wal, Jeroen Johan Maarten Van De Wijdeven | 2014-10-07 |
| 8781775 | Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus | Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Harmen Klaas Van Der Schoot, Marc Wilhelmus Maria Van Der Wijst +2 more | 2014-07-15 |
| 8743344 | Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object | Martinus Van Duijnhoven, Johan Geerke, Joost De Pee, Cornelius Adrianus Lambertus De Hoon | 2014-06-03 |
| 8730451 | Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping method | Marco Hendrikus Hermanus Oude Nijhuis | 2014-05-20 |
| 8717532 | Active mount, lithographic apparatus comprising such active mount and method for tuning such active mount | Pieter Johannes Gertrudis Meijers, Hendrikus Johannes Schellens | 2014-05-06 |
| 8705004 | Lithographic method and apparatus | Remco Jochem Sebastiaan Groenendijk | 2014-04-22 |
| 8619232 | Method for damping an object, an active damping system, and a lithographic apparatus | Marc Wilhelmus Maria Van Der Wijst | 2013-12-31 |
| 8558989 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more | 2013-10-15 |
| 8554510 | Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product | Frank Staals, Hans Van Der Laan, Gerardus Carolus Johannus Hofmans, Sven Gunnar Krister Magnusson | 2013-10-08 |
| 8553199 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Joost De Pee, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis +1 more | 2013-10-08 |
| 8493553 | Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frame | Martinus Van Duijnhoven, Marc Wilhelmus Maria Van Der Wijst | 2013-07-23 |
| 8482845 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2013-07-09 |
| 8472002 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more | 2013-06-25 |
| 8446567 | Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage system | Engelbertus Antonius Fransiscus Van Der Pasch | 2013-05-21 |