Issued Patents All Time
Showing 126–150 of 152 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7468782 | Lithographic apparatus, position quantity controller and control method with feedforward signal | — | 2008-12-23 |
| 7433018 | Pattern alignment method and lithographic apparatus | — | 2008-10-07 |
| 7420299 | Lithographic apparatus and device manufacturing method | Franciscus Adrianus Gerardus Klaassen | 2008-09-02 |
| 7382439 | Lithographic apparatus and device manufacturing method | — | 2008-06-03 |
| 7352436 | Lithographic apparatus, projection apparatus and device manufacturing method | Evert Hendrik Jan Draaijer, Marcus Joseph Elisabeth Godfried Breukers | 2008-04-01 |
| 7352149 | Method for controlling the position of a movable object, a positioning system, and a lithographic apparatus | Franciscus Adrianus Gerardus Klaassen | 2008-04-01 |
| 7349101 | Lithographic apparatus, overlay detector, device manufacturing method, and device manufactured thereby | — | 2008-03-25 |
| 7348752 | Stage apparatus and lithographic apparatus | — | 2008-03-25 |
| 7330238 | Lithographic apparatus, immersion projection apparatus and device manufacturing method | Jan-Gerard Cornelis Van Der Toorn, Henrikus Herman Marie Cox, Evert Hendrik Jan Draaijer, Nicolaas Ten Kate, Frits Van Der Meulen +4 more | 2008-02-12 |
| 7265813 | Lithographic apparatus and device manufacturing method | Martijn Houkes, Henrikus Herman Marie Cox | 2007-09-04 |
| 7256866 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Ronald Casper Kunst, Harmen Klaas Van Der Schoot, Youssef Karel Maria De Vos | 2007-08-14 |
| 7227614 | Measurement method, device manufacturing method and lithographic apparatus | Martinus Godefridus Helena Boogaarts | 2007-06-05 |
| 7213963 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2007-05-08 |
| 7209219 | System for controlling a position of a mass | — | 2007-04-24 |
| 7199858 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more | 2007-04-03 |
| 7193722 | Lithographic apparatus with disturbance correction system and device manufacturing method | Martinus Godefridus Helena Boogaarts, Henrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Jan Jaap Kuit | 2007-03-20 |
| 7190437 | Wireless signaling in a lithographic apparatus | Stoyan Nihtianov, Petrus Wilhelmus Josephus Maria Kemper | 2007-03-13 |
| 7170582 | Support device and lightographic apparatus | Frank Auer, Martinus Van Duijnhoven, Pieter Johannes Gertrudis Meijers, Jan-Gerard Cornelis Van Der Toorn, Joost De Pee | 2007-01-30 |
| 7126674 | Positioning device and device manufacturing method | — | 2006-10-24 |
| 7113256 | Lithographic apparatus and device manufacturing method with feed-forward focus control | Marcus Boonman, Petrus Marinus Christianus Maria Van Den Biggelaar | 2006-09-26 |
| 7098990 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2006-08-29 |
| 7084958 | Lithographic apparatus, control system and device manufacturing method | — | 2006-08-01 |
| 6912041 | Lithographic apparatus and method | Thijs Rein Verbeek | 2005-06-28 |
| 6798497 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby, and measurement method | — | 2004-09-28 |
| 6741331 | Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured thereby | Marcus Boonman, Johannes Catharinus Hubertus Mulkens | 2004-05-25 |