Issued Patents All Time
Showing 101–125 of 152 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8368868 | Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless | Johannes Petrus Martinus Bernardus Vermeulen, Marcel Koenraad Marie Baggen, Henrikus Herman Marie Cox, Jan Van Eijk, Andre Bernardus Jeunink +7 more | 2013-02-05 |
| 8319940 | Position measurement system and lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch | 2012-11-27 |
| 8248583 | Lithographic apparatus and calibration method | Marinus Aart Van Den Brink, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst, Georgo Angelis +4 more | 2012-08-21 |
| 8245824 | Combination of structure and an active damping system, and a lithographic apparatus | Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker | 2012-08-21 |
| 8243258 | Lithographic apparatus having acoustic resonator | Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Joost De Pee, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis +1 more | 2012-08-14 |
| 8164737 | Lithographic apparatus having an active damping subassembly | Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker | 2012-04-24 |
| 8154708 | Lithographic apparatus and device manufacturing method | Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +16 more | 2012-04-10 |
| 8144310 | Positioning system, lithographic apparatus and device manufacturing method | Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens, Marc Wilhelmus Maria Van Der Wijst +4 more | 2012-03-27 |
| 8059259 | Damping arrangement, active damping system, lithographic apparatus, and projection assembly | Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker | 2011-11-15 |
| 8044373 | Lithographic apparatus and device manufacturing method | — | 2011-10-25 |
| 7936443 | Lithographic apparatus and device manufacturing method | Frank Auer | 2011-05-03 |
| 7859644 | Lithographic apparatus, immersion projection apparatus and device manufacturing method | Jan-Gerard Cornelis Van Der Toorn, Henrikus Herman Marie Cox, Evert Hendrik Jan Draaijer, Nicolaas Ten Kate, Frits Van Der Meulen +4 more | 2010-12-28 |
| 7847919 | Lithographic apparatus having feedthrough control system | — | 2010-12-07 |
| 7760324 | Lithographic apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Nicolaas Rudolf Kemper, Bartholomeus Hendricus Koek, Frits Van Der Meulen, Harmen Klaas Van Der Schoot | 2010-07-20 |
| 7675201 | Lithographic apparatus with planar motor driven support | Franciscus Adrianus Gerardus Klaassen | 2010-03-09 |
| 7649613 | Lithographic apparatus, method of controlling a component of a lithographic apparatus and device manufacturing method | — | 2010-01-19 |
| 7630059 | Lithographic apparatus and device manufacturing method | Jan-Gerard Cornelis Van Der Toorn, Martijn Houkes, Wilhelmus Franciscus Johannes Simons | 2009-12-08 |
| 7592760 | Lithographic apparatus and device manufacturing method | Franciscus Adrianus Gerardus Klaassen | 2009-09-22 |
| 7593093 | Lithographic apparatus and device manufacturing method | Joeri Lof, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more | 2009-09-22 |
| 7593092 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more | 2009-09-22 |
| 7538273 | Cable connection to decrease the passing on of vibrations from a first object to a second object | Martinus Van Duijnhoven, Johan Geerke, Joost De Pee, Cornelius Adrianus Lambertus De Hoon | 2009-05-26 |
| 7525643 | Lithographic apparatus, and mechanism | — | 2009-04-28 |
| 7518705 | Lithographic apparatus and device manufacturing method | Antonie Hendrik Verweij, Edwin Johan Buis | 2009-04-14 |
| 7505114 | Lithographic apparatus and device manufacturing method | — | 2009-03-17 |
| 7468589 | Lithographic apparatus having a controlled motor, and motor control system and method | Henrikus Herman Marie Cox, Sven Antoin Johan Hol | 2008-12-23 |