| 8968630 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Arie Jeffrey Den Boef |
2015-03-03 |
| 8845320 |
Imprint lithography apparatus |
Catharinus De Schiffart, Johannes Petrus Martinus Bernardus Vermeulen, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Norbert Erwin Therenzo Jansen |
2014-09-30 |
| 8685295 |
Imprint lithography apparatus |
Johannes Petrus Martinus Bernardus Vermeulen, Yvonne Wendela Kruijt-Stegeman |
2014-04-01 |
| 8529823 |
Imprint lithography |
Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman |
2013-09-10 |
| 8368868 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless |
Johannes Petrus Martinus Bernardus Vermeulen, Marcel Koenraad Marie Baggen, Hans Butler, Henrikus Herman Marie Cox, Jan Van Eijk +7 more |
2013-02-05 |
| 8319968 |
Imprint lithography |
Arie Jeffrey Den Boef, Johannes Petrus Martinus Bernardus Vermeulen, Pascal Antonius Smits, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman +1 more |
2012-11-27 |
| 8269949 |
Lithographic apparatus and device manufacturing method |
Marcus Martinus Petrus Adrianus Vermeulen, Erik Roelof Loopstra, Joost Jeroen Ottens, Rene Theodorus Petrus Compen, Peter Smits +4 more |
2012-09-18 |
| 8139217 |
Alignment systems and methods for lithographic systems |
Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more |
2012-03-20 |
| 8043085 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Johannes Petrus Martinus Bernardus Vermeulen, Sander Frederik Wuister, Raymond Wilhelmus Louis Lafarre, Catharinus De Schiffart +1 more |
2011-10-25 |
| 7880880 |
Alignment systems and methods for lithographic systems |
Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more |
2011-02-01 |
| 7675607 |
Lithographic apparatus and device manufacturing method |
Marcel Koenraad Marie Baggen, Dirk-Jan Bijvoet, Thomas Josephus Maria Castenmiller |
2010-03-09 |
| 7652749 |
Software upgrades in a lithographic apparatus |
Antonius Johannes De Kort |
2010-01-26 |
| 7626684 |
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus |
M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Wim Tjibbo Tel +3 more |
2009-12-01 |
| 7564536 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Marcus Boonman, Thomas Josephus Maria Castenmiller |
2009-07-21 |
| 7439531 |
Alignment systems and methods for lithographic systems |
Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more |
2008-10-21 |
| 7440079 |
Lithographic apparatus, alignment system, and device manufacturing method |
Arie Jeffrey Den Boef, Henricus Petrus Maria Pellemans, Irwan Dani Setija, Cas Johannes Petrus Maria VAN NUENEN, Stefan Carolus Jacobus Antonius Keij |
2008-10-21 |
| 7403264 |
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus |
M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Wim Tjibbo Tel +3 more |
2008-07-22 |
| 7332732 |
Alignment systems and methods for lithographic systems |
Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more |
2008-02-19 |
| 7329888 |
Alignment systems and methods for lithographic systems |
Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more |
2008-02-12 |
| 7297971 |
Alignment systems and methods for lithographic systems |
Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more |
2007-11-20 |
| 7262831 |
Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus |
M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Wim Tjibbo Tel +2 more |
2007-08-28 |
| 7084952 |
Lithographic apparatus, device manufacturing method, and computer-readable storage medium |
Frank Commissaris, Vera Lemmen, M'hamed Akhssay |
2006-08-01 |
| 7002667 |
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby |
Leon Martin Levasier, Arie Jeffrey Den Boef, Ingo Dirnstorfer, Stefan Geerte Kruijswijk, Henricus Petrus Maria Pellemans +2 more |
2006-02-21 |
| 6995831 |
Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure |
Leon Martin Levasier, Arie Jeffrey Den Boef, Ingo Dirnstorfer, Stefan Geerte Kruijswijk, Henricus Petrus Maria Pellemans +2 more |
2006-02-07 |
| 6844918 |
Alignment system and methods for lithographic systems using at least two wavelengths |
Ramon Navarro Y Koren, Hubertus Johannes Gertrudus Simons |
2005-01-18 |