Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D921431 | Multi-filament heater assembly | Sandeep Krishnan, Bojan Mitrovic, Aniruddha Bagchi, Alexander I. Gurary, Chenghung Paul Chang +1 more | 2021-06-08 |
| 8614786 | Robot for in-vacuum use | Robert Gabriël Maria Lansbergen, George Hilary Harrold | 2013-12-24 |
| 7869003 | Lithographic apparatus and device manufacturing method with reticle gripper | Jonathan H. Feroce | 2011-01-11 |
| 6876453 | Metrology system for precision 3D motion | Michael Kuechel, Christopher J. Evans | 2005-04-05 |
| 5733024 | Modular system | Alexander H. Slocum, Rodney Scott Ziegenhagen, II, Don R. Sauer | 1998-03-31 |
| 5733096 | Multi-stage telescoping structure | Alexander H. Slocum, Don R. Sauer | 1998-03-31 |
| 5700046 | Wafer gripper | Don R. Sauer, Alexander H. Slocum, David Pap Rocki, Johann Tam, Larry Gerszewski | 1997-12-23 |