| 8446570 |
System and method for using a two part cover and a box for protecting a reticle |
Santiago del Puerto, Erik Roelof Loopstra, Andrew Massar, Duane P. Kish, Abdullah Alikhan +1 more |
2013-05-21 |
| 7869003 |
Lithographic apparatus and device manufacturing method with reticle gripper |
Matthew J. Van Doren |
2011-01-11 |
| 7830497 |
System and method for using a two part cover and a box for protecting a reticle |
Santiago del Puerto, Erik Roelof Loopstra, Andrew Massar, Duane P. Kish, Abdullah Alikhan +1 more |
2010-11-09 |
| 7304720 |
System for using a two part cover for protecting a reticle |
Santiago del Puerto, Eric R. Loopstra, Andrew Massar, Duane P. Kish, Abdullah Alikhan +1 more |
2007-12-04 |
| 7209220 |
System for using a two part cover for and a box for protecting a reticle |
Santiago del Puerto, Erik Roelof Loopstra, Andrew Massar, Duane P. Kish, Abdullah Alikhan +1 more |
2007-04-24 |
| 6906783 |
System for using a two part cover for protecting a reticle |
Santiago del Puerto, Erik Roelof Loopstra, Andrew Massar, Duane P. Kish, Abdullah Alikhan +1 more |
2005-06-14 |