Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12248255 | Differential measurement system | Pulkit Aggarwal | 2025-03-11 |
| 10268128 | Lithographic apparatus | Franciscus Johannes Joseph Janssen, Johannes Paul Marie De La Rosette, Edwin Cornelis Kadijk, Nicolas Lallemant, Jan Liefooghe +4 more | 2019-04-23 |
| 7791709 | Substrate support and lithographic process | Pieter Renaat Maria Hennus, Frits Van Der Meulen, Joost Jeroen Ottens, Peter Paul Steijaert, Peter Smits | 2010-09-07 |