| 8243258 |
Lithographic apparatus having acoustic resonator |
Hans Butler, Johan Geerke, Joost De Pee, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis +1 more |
2012-08-14 |
| 8203694 |
Lithographic apparatus, projection assembly and active damping |
Erik Roelof Loopstra, Cornelius Adrianus Lambertus De Hoon |
2012-06-19 |
| 8174671 |
Lithographic projection apparatus and method for controlling a support structure |
Erik Roelof Loopstra, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch |
2012-05-08 |
| 8164737 |
Lithographic apparatus having an active damping subassembly |
Hans Butler, Erik Roelof Loopstra, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker |
2012-04-24 |
| 8144310 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens +4 more |
2012-03-27 |
| 8059259 |
Damping arrangement, active damping system, lithographic apparatus, and projection assembly |
Hans Butler, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker |
2011-11-15 |
| 7999914 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra, Marius Ravensbergen |
2011-08-16 |
| 7903866 |
Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object |
Engelbertus Antonius Fransiscus Van Der Pasch, Koen Jacobus Johannes Maria Zaal |
2011-03-08 |
| 7804584 |
Integrated circuit manufacturing methods with patterning device position determination |
Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Dominicus Jacobus Petrus Adrianus Franken, Bernardus Antonius Johannes Luttikhuis, Engelbertus Antonius Fransiscus Van Der Pasch +1 more |
2010-09-28 |
| 7804579 |
Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product |
Erik Roelof Loopstra, Engelbertus Antonlus Fransiscus Van Der Pasch |
2010-09-28 |
| 7554105 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra, Pertrus Bartray, Michael Jozef Mathijs Renkens, Gerard Van Schothorst +1 more |
2009-06-30 |
| 7471373 |
Lithographic apparatus with patterning device position determination |
Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Dominicus Jacobus Petrus Adrianus Franken, Bernardus Antonius Johannes Luttikhuis, Engelbertus Antonius Fransiscus Van Der Pasch +1 more |
2008-12-30 |
| 7436484 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra, Marius Ravensbergen |
2008-10-14 |
| 7307262 |
Lithographic apparatus and device manufacturing method |
Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Robertus Johannes Marinus De Jongh, Jacob Kleijn, Bastiaan Stephanus Hendricus Jansen |
2007-12-11 |
| 7116399 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Wilhelmus Josephus Box, Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +1 more |
2006-10-03 |
| 7049592 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra, Pertrus Bartray, Michael J. M. Renkens, Gerard Van Schothorst +1 more |
2006-05-23 |
| 6977713 |
Lithographic apparatus and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Pertrus Bartray, Wilhelmus Josephus Box, Martinus Hendrikus Antonius Leenders |
2005-12-20 |
| 6788386 |
Lithographic apparatus and device manufacturing method |
Hendrikus Herman Marie Cox, Frank Auer, Bastiaan Stephanus Hendricus Jansen, Dominicus Jacobus Petrus Adrianus Franken |
2004-09-07 |